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SAT emission sources

The single-atom tip (SAT) is a pyramid structure formed through the faceting effect, with a single atom positioned at the apex. This unique structure serves as an emitter for field-emission electron and ion beams. The SAT-based gas field ion source boasts exceptional properties such as high brightness and high angular current density, making it a pivotal technology for developing next-generation focused ion beam (FIB) systems. It overcomes the resolution limitations of traditional liquid metal ion source and eliminates concerns of metal contamination. Furthermore, the SAT-based field-emission electron source offers high coherence and brightness, serving as a critical technology for advancing electron holography and phase-contrast electron microscopy. It is also essential for enhancing the resolution of semiconductor in-line electron beam inspection systems. 

 

Nano Probes

The nano-probing system is a critical tool for electrical measurements in advanced semiconductor processes, widely used in research and development as well as failure analysis. Nano-probes serve as the primary consumables for this equipment. As manufacturing processes advance below the 10nm node, the specifications for probes become increasingly stringent. ALES Tech provides the industry’s highest-specification nano-probes, featuring a tip diameter of less than 20nm at a position 100nm from the apex, meeting the demanding requirements of failure analysis for 2nm processes. 

Micro Probes

Micron probes are used for various electrical measurement applications on probe stations, such as chip probing for Mini LED and Micro LED. Leveraging its proprietary probe manufacturing technology, ALES Tech offers micro probes in a wide range of specifications. Parameters such as probe diameter, tip curvature, and tip taper angle can be customized according to client requirements, ensuring compatibility with diverse probing needs on future production lines. 

STM probes

ALES Tech designs and manufactures user-friendly probes for Scanning Tunneling Microscopes (STM), solving the common issue of inconsistent probe quality in STM laboratories. In addition to standard tungsten STM probes, ALES Tech also offers STM probes made from specialized metal materials, such as highly durable platinum-iridium (PtIr) alloy probes and niobium (Nb) probes with superconducting properties. 

 

 

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